The ES5100, Electronic Scanning High-speed scanning Acoustic Tomograph, incorporates an array probe, which has many linearly arranged oscillators, electronically moves the focus point to image the interiors of semiconductors, electronic parts and power modules such as IGBT at high speed.
The image display speed can be higher than that of the focus point movement system by mechanical scanning with a single probe, when the measurement pitch is the same.
The single probe system applies an impulse voltage to one ultrasonic oscillator and uses one fixed ultrasonic beam determined by the oscillator’s size, shape and curvature factor.
On the other hand, the electronic scanning system uses an array probe with the oscillators arranged in a strip form, and changes the oscillator drive timing electronically to control the angle and focal point of the ultrasonic beam freely.
Furthermore, this technology can enable high-speed scanning by switching the array oscillators electronically.
By the combination of the electronic scan and mechanical scan, a wide variety of device-under-test can be measured in a short time at high speed.
Array probe (oscillator surface)
Image of electronic scanning
The electronic scanning system, which achieves high frequencies up to 75 MHz (nominal frequency), enables high-speed measurement by line scanning with the array probe, and images abrasion, micro void, etc. that are generated inside a device-under-test in a short period.
For example, when a device-under-test of 30 mm square is scanned at a 200 µm pitch, measurement is completed in approximately four seconds, and the planar images (hereunder, “C-scope”) in the depth direction are displayed at high speed; therefore, users can check the distribution of reflection echo intensity. The combination use of the waveform display (hereunder, “A-scope”) and the real-time sectional image (hereunder, “B-scope”) contributes to the observation of the internal status of the device-under-test.
Example of C-scope display
Example of the combination of A-scope
and B-scope displays
The ES5100 series, Electronic Scanning High-speed scanning Acoustic Tomograph, is equipped with the function of real-time image display which enables the checking and scanning simultaneously due to the measurement at a second-count speed that only electronic scanning can execute, and the high-definition analysis display.
A scope + B scope display
C scope display
Multipoint waveform display
Thumbnail layer display
3D block display
Cross-sectional view in three directions
(echo height display)
Full waveform import mode
Echo height highlighting
(optional)
(mp4 format, 6.98 MBytes)
It is a measurement method that can be applied to subjects that are difficult to be submerged in water such as power modules. To reduce contact with water, place the ultrasonic array probe under the object and make contact with the water filled between the ultrasonic array probe and the object.
| Probe | 25 MHz, 50 MHz, 75 MHz |
|---|---|
| Scanner | X, Y, Z-axis drive |
| Capturing and processing block | A, B, C-scope image display, area ratio, optional A-scope display, etc. |
| Analysis function | Automatic focal point movement Auto variable gate for evaluation 3D data display, etc. |
| Work dimensions | 300 × 200 × 50 mm or less |
