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This hybrid-type equipment has an additional high-speed inspection function by mounting an electronic scanning system, which is highly regarded in the ES5100 series, onto FineSAT which is well-received for its high resolution and operability.
Conventionally, a device-under-test was moved to another equipment for remeasurement to survey the details of abnormality detected by high-speed inspection; however, in FineSAT Hybrid, the analysis of abnormality can be implemented by the same equipment without transferring the device-under-test.
FineSAT Hybrid thus strongly supports the improvement of yield ratio in a short period.
Example in which a single probe is attached
to the left and an array probe to the right.
Because a single probe and array probe can be attached at the same time, both the high-definition measurement with a FineSAT single probe and high-speed measurement by using the electronic scanning system can be achieved in one unit.
The probe selection on the GUI screen enables automatic scan-mode switching.
Electronic scanning enables a real-time B-scope (sectional) display at a measurement speed of approx. 5-10 times* the speed of a single probe.
A single probe with a scanning frequency of 5–300 MHz and an array probe with a frequency selected from 25, 50 and 75 MHz can be combined and attached.
| FS100ⅢHy | FS200ⅢHy | FS300ⅢHy | |
|---|---|---|---|
| Probe frequency (MHz): Single | 5–75 | 5–140 | 5–300 |
| Array probe frequency (MHz) | 25, 50, 75 | ||
| Number of simultaneous driving devices (ch) | 16 | ||
| Multiple gates of electronic scanning | 2 | ||
| Probe attachment | Single probe only, array probe only, and single + array probe simultaneous attachable | ||
| Miscellaneous | Single scanning measurement / electronic scanning measurement switching type
(simultaneous measurement is not possible) |
||
